About Semiconductors for Micro- and Nanotechnology: An Introduction for Engineers
Semiconductors for Micro- and Nanotechnology: An Introduction for Engineers- By Jan G. Korvink, Andreas Greiner; John Wiley and Sons, 2002, ISBN 3527302573. Textbook on properties and behavior of semiconductors, how to use them to design and make micro- and nano-systems. [publisher website]
