Hybrid Plasma Equipment Model (HPEM)

Hybrid Plasma Equipment Model (HPEM)
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Details of Hybrid Plasma Equipment Model (HPEM)

About Hybrid Plasma Equipment Model (HPEM)
Hybrid Plasma Equipment Model (HPEM)- Code developed by prof. M.J. Kushner and his group for 2D numerical simulation of reactive ion etching reactors.
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